Process for producing silicon nitride
US4483839A · kind A · utility
6Cited by
2References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 18, 1983 |
| Grant date | Nov 20, 1984 |
| Priority date | — |
| Expiry date | Jul 18, 2003 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2002/72
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Impurities are removed from chaff by acid treatment, and the chaff is heated for carbonization. Silicon is reduced from the carbonized chaff, and nitrided to form silicon nitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.