Method of depositing a carbon film on a substrate and products obtained thereby
US4486286A · kind A · utility
186Cited by
2References
23Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Sep 28, 1982 |
| Grant date | Dec 4, 1984 |
| Priority date | — |
| Expiry date | Sep 28, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is disclosed a method for depositing a diamond or diamond-like carbon film on at least one substrate employing a hydrocarbon gas and at least one gas which preferentially removes by chemical sputtering other forms of carbon, especially graphite from said film to thereby obtain useful carbon film coated products.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.