Arrangement and process for adjusting imaging systems
US4486664A · kind A · utility
Inventor
Key dates
| Filing date | Jul 26, 1982 |
| Grant date | Dec 4, 1984 |
| Priority date | — |
| Expiry date | Jul 26, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/1471
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arrangement and a process for adjusting imaging systems for bundles of charged particles, or for adjusting spectrometers for bundles of charged particles, are indicated, in which arrangement and process electric and/or magnetic correcting elements are used, which possess, in every case, a large number of electrodes and/or current conductors, which are arranged, symmetrically or asymmetrically, around the optical axis of the particle bundle, these electrodes being at potentials such that the resulting potentials V (r, .PHI.) at an azimuth angle (.PHI.) to a cylindrical surface at a radius (r) around an optical axis (Z) can be represented as the sum of V.sub.1 and V.sub.2, or, as the case may be, these current conductors carrying currents such that the magnitudes of the resulting currents I (r, .PHI.) at the azimuth angle (.PHI.), as defined above, can be represented as the sum of I.sub.1 and I.sub.2. The expressions V.sub.1, V.sub.2 and I.sub.1, I.sub.2 can, in their turn, be represented as sums, their addends being, respectively, of the type V.sub.1 =V.sub.1k sink.PHI., V.sub.2 =V.sub.2k cosk.PHI., and I.sub.1 =I.sub.1k sink.PHI. and I.sub.2 =I.sub.2k cosk.PHI., where k=1, 2, . …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.