Mass flow controller apparatus
US4487213A · kind A · utility
34Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1982 |
| Grant date | Dec 11, 1984 |
| Priority date | — |
| Expiry date | Sep 9, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.