Elevating jig for semi-conductor wafers and similar articles
US4490087A · kind A · utility
13Cited by
10References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1982 |
| Grant date | Dec 25, 1984 |
| Priority date | — |
| Expiry date | Jul 27, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An elevating jig, particularly suitable for elevating selected semi-conductor wafers in boat or holding member, has a base and a plurality of removable lift members which fit in apertures in the base. A locating member is provided at one end of the base for positioning a holding member on the base and the apertures in the base are at predetermined positions from the locating member. Lift members can be positioned as desired and when a holding member is placed on the jig certain wafers are lifted up, enabling easy withdrawal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.