Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper
US4491530A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 20, 1983 |
| Grant date | Jan 1, 1985 |
| Priority date | — |
| Expiry date | May 20, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/422
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Stripping solution compositions which avoid the problem know as "brown staining" are provided. Relevant stripping solutions are those that are free from phenol and chlorinated hydrocarbon compounds and comprise a surfactant alkylarylsulfonic acid having 12-20 carbons, a hydrotropic aromatic sulfonic acid having 6-9 carbons and a halogen-free aromatic hydrocarbon solvent with a boiling point above 150.degree. C. To suppress brown staining, a water soluble sulfone is incorporated into the stripping solution. The stripping compositions effectively remove organic polymeric substances from inorganic substrates and are substantially clear water rinsable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.