Apparatus for indexing and registering a selected deposition mask to a substrate and method therefor
US4492180A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 16, 1981 |
| Grant date | Jan 8, 1985 |
| Priority date | — |
| Expiry date | Mar 16, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus for indexing and accurately registering a selected one of a plurality of deposition masks in operative relationship to a substrate comprising carriage means for supporting a plurality of deposition masks in an aligned spaced relationship relative to each other wherein each of the deposition masks has a selected number of prealigned registration members located thereon in a predetermined pattern and which are adapted to co-act with reference registration members loaded thereagainst, gantry means for supporting a substrate at a deposition station above the surface of the deposition masks having the prealigned registration members located thereon, reference registration members which are located on the substrate or around the periphery of the gantry means and which are directed towards and adapted to be loaded against the prealigned registration members to position the gantry means and the substrate relative to the selected one of said plurality of deposition masks, indexing means for transporting the carriage means including one or more deposition masks supported thereby or gantry means along a predetermined path and to index a selected one of the plurality of deposition ma…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.