Electron gun assembly
US4493097A · kind A · utility
1Cited by
4References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 1982 |
| Grant date | Jan 8, 1985 |
| Priority date | — |
| Expiry date | Aug 30, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J35/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to an electron gun assembly for use, for example, in x-ray lithography, which includes an electron emitter assembly, beam forming elements disposed adjacent the electron emitter assembly, a target plane disposed in spaced relationship with respect to the electron emitter assembly, a deflector disposed adjacent the path of the electrons emitted from the electron emitter assembly, a pseudoanode mounted in spaced relationship with respect to the deflector and to the electron emitter assembly and to the target plane, said electron emitter assembly being interposed between the pseudoanode and the target plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.