Wafer processing cassette
US4493418A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 17, 1983 |
| Grant date | Jan 15, 1985 |
| Priority date | — |
| Expiry date | Aug 17, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Wafer cassette for processing of wafers which includes a plurality of open supported wafer dividers for supporting a plurality of wafers in alignment in opposing dividers of the cassette for automated processing of the wafers while in the cassette. The wafer cassette utilizes an H-bar end with a configured rod reinforced open front which is fully functional and strategically located. The dividers are supported by longitudinal horizontal supports secured to the ends providing for open area between each of the dividers for passage of liquids during automated processing. The cassette provides open area about the H-bar end. The rear end which includes a downward arch and through the dividers for open, non-restricted automated processing of wafers. The processing wafer cassette provides for "on-center" processing where the carrier center of gravity is on-center of the axis of centrifugal wafer processing machinery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.