Susceptor for radiant absorption heater system
US4499354A · kind A · utility
542Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1982 |
| Grant date | Feb 12, 1985 |
| Priority date | — |
| Expiry date | Oct 6, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.