Oxygen sensor with heater
US4500412A · kind A · utility
38Cited by
9References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1982 |
| Grant date | Feb 19, 1985 |
| Priority date | — |
| Expiry date | Aug 3, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor which has an insulating substrate on which is formed a heater layer for heating the sensor on a part thereof and which is operated above a predetermined temperature. The heater layer is made of a material which has a thickness of 0.2 .mu.m to 20 .mu.m and which is made of platinum, rhodium, palladium or a mixture thereof. The insulating substrate is made of alumina, quartz, spinel, magnesia, zirconia, or mixtures thereof. A heater protective layer having a thickness of 0.01 .mu.m to 500 .mu.m is made of materials based on alumina, silica, spinel, magnesia, zirconia or mixtures thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.