Turbo-molecular pump
US4502832A · kind A · utility
13Cited by
11References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 10, 1983 |
| Grant date | Mar 5, 1985 |
| Priority date | — |
| Expiry date | Feb 10, 2003 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbo-molecular pump has passive magnetic bearings which are radially stable but axially unstable and mechanical thrust bearings acting axially, the magnetic bearings and the stator forming a structural unit movable axially within the pump housing and connected to an element adjustably supporting one thrust bearing while the other thrust bearing is fixed to the housing with control gear being provided for adjusting the structural unit relative to the housing and the thrust bearing relative to the structural unit in dependence on force sensing devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.