Semiconductor printing apparatus with multiple independent temperature control
US4503335A · kind A · utility
144Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 1982 |
| Grant date | Mar 5, 1985 |
| Priority date | — |
| Expiry date | Apr 6, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/30
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A semiconductor printing apparatus eliminates the alignment error caused by any relative deformation between the mask and the wafer due to variations in parameters such as temperature change, and intermediate processing, for example, etching etc. The apparatus is characterized by the provision of a device for cooling or heating respectively and independently plural different sections of at least either of the mask and the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.