Diamond-like film and process for producing same
US4504519A · kind A · utility
223Cited by
2References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 3, 1983 |
| Grant date | Mar 12, 1985 |
| Priority date | — |
| Expiry date | Nov 3, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An amorphous, carbonaceous, diamond-like film and a process for producing the same is disclosed. The film has an extremely low hydrogen content and an extremely low stress, is resistant to both acids and alkalis, and adheres tenaciously to many types of substrates including glasses, plastics, metals, and semiconductors. The process for producing this film is a hybrid process using radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.