Electron beam cutting
US4508952A · kind A · utility
1Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 1983 |
| Grant date | Apr 2, 1985 |
| Priority date | — |
| Expiry date | Feb 17, 2003 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K15/085
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.