Particle detection system
US4513613A · kind A · utility
6Cited by
11References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1983 |
| Grant date | Apr 30, 1985 |
| Priority date | — |
| Expiry date | Jun 7, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system for detecting the presence of debris on ceramic green sheets prior to screening. The sheets are deposited on a planar stage using a pick-up head. The pick-up head carries a sensor to determine whether or not debris adhering to the head, the sheet or the stage is presenting a non-planar sheet surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.