Bakeable cryopump
US4514204A · kind A · utility
12Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 1983 |
| Grant date | Apr 30, 1985 |
| Priority date | — |
| Expiry date | Mar 21, 2003 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25D19/006
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A bakeable cryopump having a housing and means to removeably receive the displacer end of a cryogenic refrigerator to cool internal cryopanels said cryopumps adapted for removal of the refrigerator without loss of vacuum inside the cryopump and further adapted to be heated under vacuum to remove pumped gases primarily water so that the cryopumps after cooling can be used at vacuum of at least 10.sup.-10 Torr.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.