Scanning transmission electron microscopes
US4514629A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1983 |
| Grant date | Apr 30, 1985 |
| Priority date | — |
| Expiry date | Jun 29, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2805
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a scanning transmission electron microscope 1 the image of the diffraction pattern formed on a phosphor screen 6 as a result of electron beam impingement on a point on the specimen 4 is converted by a camera 7 into a video signal and digitized in an ADC convertor 9 and stored in a digital store 10. The stored signal is then modified by a weighting factor representing a notional pattern overlaying screen 6. The weighting factor may have one of two binary values, representing a notional opaque and transparent pattern, or may have a multiplicity of different values. The modified signals are then added together to provide a picture value for the point of impingement. By this means a complete picture is built up point-by-point. To speed up the picture taking operation diffraction images from different points may be displayed on different parts of screen 6 so that several images can be scanned together by camera 7.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.