Magnetron cathode for cathodic evaportion apparatus

US4515675A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Jorg Kieser · Albstadt, DE
• Reiner Kukla · Hanau, DE
• Gerd Deppisch · Aschaffenburg, DE

Key dates

• Filing date: Jun 27, 1984
• Grant date: May 7, 1985
• Expiry date: Jun 27, 2004

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/3423
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A magnetron cathode for cathodic evaporation apparatus with a target holder (10) for releasably securing a plate-like target (9). The associated magnet arrangement (7) has pole faces (7c, 7d) for producing at least one circumferentially closed tunnel of magnetic field lines which overlaps the target. The magnet arrangement (7) is accommodated in a housing of non-ferromagnetic material which extends over the pole faces. To increase the utilization factor of the target material without the pole faces or housing parts participating in the atomization process, PA0 (a) the projections of the target (9 ) and the pole faces (7c, 7d) in a common plane parallel to the target face (9a) do not intersect each other, PA0 (b) in the zone of the pole faces (7c, 7d), the housing (16) is extended in the atomization direction in front of the target face (9a) or in the extreme case lies in the plane of the target face (9a), and PA0 (c) the housing (16) together with the magnet system (7) is electrically insulated as regards both the target holder (10) and earth (4).