High-frequency piezoelectric resonator with reinforced electrode connection
US4517485A · kind A · utility
7Cited by
8References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 1983 |
| Grant date | May 14, 1985 |
| Priority date | — |
| Expiry date | May 26, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The high-frequency piezoelectric resonator comprises a quartz plate or disk having a region of reduced thickness which forms a diaphragm and is joined to the remainder of the plate or disk by means of a zone forming a step. A conductive electrode extends from the exterior of the disk or plate to the center of the thinned region and is provided with a conductive tongue constituted by a metallic film-layer of controlled thickness and disposed in the stepped zone. The method involves formation of the disk or plate by ion machining whereas the electrodes and the conductive tongue are formed by the sputtering technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.