Thin-film strain gauge

US4522067A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Kurt Burger · Friolzheim, DE
• Heiko Gruner · Stuttgart, DE

Key dates

• Filing date: Sep 17, 1982
• Grant date: Jun 11, 1985
• Expiry date: Sep 17, 2002

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49103
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A thin-film strain gauge and a method for producing it are proposed; the strain gauge is advantageously capable of integration into a thin-film circuit. The strain gauge comprises an elastically deformable spring element in combination with at least one elongation-sensitive resistor. The resistor disposition (R1-R4), the low-impedance connections (L11-L42) between the various resistance regions and the associated connection tracks (L5-L8) are applied in a vacuum process, preferably by cathode sputtering. The low-impedance connections (L11-L42) and the connection tracks (L5-L8) are of material which, although different from the material making up the actual resistance region, still has approximately the same temperature coefficient of resistance, so as to preclude errors caused by temperature.