Method for coating quartz with boron nitride
US4522849A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 18, 1983 |
| Grant date | Jun 11, 1985 |
| Priority date | — |
| Expiry date | Oct 18, 2003 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/152
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for coating quartz with a protective boron nitride film constitutes heating the quartz member to a temperature of 900.degree. C. to 1000.degree. C. in a stream of inert gas. After heating the quartz member to the desired temperature, the flow of inert gas is discontinued, whereupon ammonia and diborane gases, mixed at a temperature of 200.degree. C. to 400.degree. C., are allowed to flow past the quartz member. The flow of mixed ammonia and diborane gases is maintained for a time sufficient to deposit a boron nitride film of desired thickness. The boron nitride is produced by chemical reaction between ammonia and diborane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.