Method of and apparatus for handling crystal ingots
US4523972A · kind A · utility
3Cited by
8References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 28, 1983 |
| Grant date | Jun 18, 1985 |
| Priority date | — |
| Expiry date | Nov 28, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1032
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A semiconductor crystal ingot (14) is supportively engaged by an ingot handling apparatus (22) which contacts a base (38) of the ingot (14) with a base support (36) and opposite sides of a lateral surface of the ingot (14) with at least one pair of jaws (37). The jaws (37) are retained adjacent to but out of firm contact with the lateral surface of the ingot until after the support (36) firmly supports the weight of the ingot. The support and the at least one pair of jaws are retracted from a furnace (10) simultaneously in a lateral direction with no relative movement to withdraw the ingot from the furnace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.