Method of fabricating a silicon lens array
US4524127A · kind A · utility
28Cited by
0References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 27, 1983 |
| Grant date | Jun 18, 1985 |
| Priority date | — |
| Expiry date | Apr 27, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lenticular array in silicon is made by anisotropically etching a V-shaped groove in a 100 silicon wafer wherein the walls of the V are made by intersecting 111 planes and exposing the surface having the V-grooves therein to a polishing etch whereby a series of lenses is formed between the V-grooves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.