Patent · US Expired

Method of fabricating a semiconductor pn junction

US4526632A · kind A · utility

16Cited by
11References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 9, 1983
Grant dateJul 2, 1985
Priority date
Expiry dateFeb 9, 2003

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/864
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of forming a pn junction with a Group IIB-VIB compound semiconductor containing Zn is disclosed, the method including preparing an n type semiconductor region either locally or entirely in a Group IIB-VIB compound semiconductor crystal obtained by relying on a crystal growth method in liquid phase using a temperature difference technique, and subjecting this crystal to a thermal annealing in a Zn solution or in a Zn atmosphere to produce an n type region. Crystal growth is conducted while controlling the vapor pressure of the constituent Group IVB element to produce a p type region. A combination of all these steps gives a more stable pn junction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.