Removable polishing pad assembly
US4527358A · kind A · utility
11Cited by
4References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1983 |
| Grant date | Jul 9, 1985 |
| Priority date | — |
| Expiry date | Aug 29, 2003 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/16
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A removable polishing pad for a polishing machine that provides a rotatable polishing platen that supports the polishing pad. The pad assembly of this invention includes a circular polishing pad that is adhesively attached to one surface of a circular carrier disc. The polishing pad has a diameter less than that of the carrier disc such that the exposed circumferential edge of the disc is equipped to provide means for removably securing the disc to the platen for rotation therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.