Patent · US Expired

Thin-film humidity sensor for measuring the absolute humidity and method for the production thereof

US4530030A · kind A · utility

5Cited by

1References

13Claims

0Family size

Assignee

Endress u Hauser GmbH u Co. · DE

Inventors

Wolfgang Woest · Rheinfelden (Baden), DE
Rainer Silbermann · Schopfheim, DE
Frank Hegner · Bad Kötzting, DE

Key dates

Filing date	Dec 22, 1983
Grant date	Jul 16, 1985
Priority date	—
Expiry date	Dec 22, 2003

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49169
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.