Semiconductor pressure transducer
US4530244A · kind A · utility
20Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 25, 1984 |
| Grant date | Jul 23, 1985 |
| Priority date | — |
| Expiry date | Jun 25, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer for sensing pressure formed of a single crystal semiconductor chip having a cavity formed in one surface, wherein a tube to communicate pressure to the cavity surrounds the cavity, wherein pressure measuring sensors are disposed opposite the cavity and wherein additional pressure-responsive sensors are disposed on the chip to provide a signal for compensating for zero shift temperature and pressure induced signals generated by the measuring sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.