Silane purification process
US4532120A · kind A · utility
12Cited by
6References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1983 |
| Grant date | Jul 30, 1985 |
| Priority date | — |
| Expiry date | Dec 28, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for the removal of and analysis of phosphine and arsine impurities in silane gas. Silane gas which normally contains the impurities of AsH.sub.3 and PH.sub.3 is contacted with a solution of NaAlH.sub.4 in dimethoxyethane, other ether or amine to remove the impurities therefrom. The dimethoxyethane or other ether solution may then be hydrolyzed with water or alcohol to evolve hydrogen gas from the NaAlH.sub.4 and to re-evolve phosphine and arsine which may then be quantitatively determined by gas chromatography, atomic absorption, or other means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.