Particle-free dockable interface for integrated circuit processing
US4532970A · kind A · utility
108Cited by
7References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1983 |
| Grant date | Aug 6, 1985 |
| Priority date | — |
| Expiry date | Sep 28, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A particle-free dockable interface is disclosed for linking together two spaces each enclosing a clean air environment. The interface is composed of interlocking doors on each space which fit together to trap particles which have accumulated from the dirty ambient environment on the outer surfaces of the doors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.