Optical selective demetallization apparatus
US4533813A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 1983 |
| Grant date | Aug 6, 1985 |
| Priority date | — |
| Expiry date | Sep 6, 2003 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/067
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for applying optical energy to selectively remove material carried upon a substrate, preferably in substantially parallel lanes of material-free areas, which apparatus comprises an optical generator for generating optical energy in a primary beam, partitioning devices for dividing the primary beam into a plurality of derivative beams, reflective devices for reflecting each of the derivative beams to form a plurality of working beams which impact the substrate, focusing lenses for focusing each of the plurality of working beams upon the substrate, and transport means for transporting the substrate in a direction transverse of the plurality of working beams to effect continuous removal of material in substantially parallel lanes from the substrate by the working beams. In the preferred embodiment of the apparatus, phase retarders are utilized to shift the vector orientation of selected of the derivative beams in a manner whereby each of the working beams is of substantially equal intensity, a beam expander is used for diffusing the primary beam to reduce energy concentration upon optical elements of the apparatus. The lens assemblies are configured to focus the working b…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.