Apodized mirror optical system
US4537478A · kind A · utility
6Cited by
5References
14Claims
0Family size
Inventor
Key dates
| Filing date | Jan 19, 1984 |
| Grant date | Aug 27, 1985 |
| Priority date | — |
| Expiry date | Jan 19, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B19/0047
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical system for producing substantially uniform illumination at an exposure plane has an apodized mirror in the form of a plurality of petals which can be individually adjusted to permit illumination intensity adjustment at the focal plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.