Semiconductor wafer transport system
US4540326A · kind A · utility
47Cited by
11References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 1982 |
| Grant date | Sep 10, 1985 |
| Priority date | — |
| Expiry date | Sep 17, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system is described for the automated transfer of wafer carriers containing semi-conductor wafers, to various work stations and processing units along a process line. The system includes tunnel and track segments which are joined to provide a path of desired length. A semi-conductor carrier rides on a cart, which is in one tunnel and is magnetically coupled to a motorized cart which is in a separate tunnel to keep contaminants away from the wafer carrier. The tunnel enclosing the wafer carrier is also purged with nitrogen or filtered air to keep contaminants away from the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.