Patent · US Expired

Method of making a bolometric radiation detector

US4544441A · kind A · utility

19Cited by

5References

9Claims

0Family size

Assignee

Battelle Institute e.V. · DE

Inventors

Rolf Hartmann · Jena, DE
Albrecht Krah · Wächtersbach, DE
Hilda Egle · Heusenstamm, DE
Rudolf Ziegler · Thale, DE

Key dates

Filing date	Jul 11, 1983
Grant date	Oct 1, 1985
Priority date	—
Expiry date	Jul 11, 2003

Classification

Technology area (CPC H)Electricity
CPC primaryH01C17/003
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A bolometric radiation detector wherein the electrically-conductive measuring layer is applied to a carrier film which is supported by a frame. To produce a bolometer of this type the carrier film is produced as a layer on a base material, preferably by anodic or thermal oxidation of the base material. The measuring layer is applied to the carrier film. After providing the base material and the measuring layer with a photoresist layer, the conductors are etched out and a window is made from the reverse side. The carrier film with the measuring layer structure then remains. The parts of the base material that have not been removed serve as a frame for the carrier film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.