Method of and apparatus for coating shaped parts by cathodic atomization

US4544468A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Wolf-Dieter Munz · Somborn, DE
• Gerhard Hessberger · Karlstein, DE

Key dates

• Filing date: Jan 19, 1984
• Grant date: Oct 1, 1985
• Expiry date: Jan 19, 2004

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/352
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An apparatus for and method of coating a three-dimensional shaped-part surface by the cathodic atomization of target material from two, facing, magnetically-concentrating cathodic atomization devices applies a voltage, which is negative with respect to ground and of such magnitude that touching of the plasma clouds from the devices is facilitated to the shaped part.