Narrow line width pattern fabrication
US4550257A · kind A · utility
22Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1984 |
| Grant date | Oct 29, 1985 |
| Priority date | — |
| Expiry date | Jun 29, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/857
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The formation of lines of the order of 8 Angstroms wide is achieved using a tunneling current through a gas that changes to provide a residue that is the basis of the line. The tunneling current energy is tuned to the energy required to dissociate the gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.