Cryopump with improved second stage array
US4555907A · kind A · utility
17Cited by
6References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 18, 1984 |
| Grant date | Dec 3, 1985 |
| Priority date | — |
| Expiry date | May 18, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A second stage cryopanel array suitable for both concentric refrigerators and side entry cryopumps is formed of two groups of semi-circular baffles mounted to respective L-shaped brackets. The array sections can be independently positioned about a second stage of a refrigerator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.