Focused ion beam column
US4556798A · kind A · utility
25Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1983 |
| Grant date | Dec 3, 1985 |
| Priority date | — |
| Expiry date | Jul 12, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3007
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Two lens focused ion beam column (10) has an accelerating lens (20) which carries a potential to focus an image of the liquid metal ion source (14) on the mass analyzer slit (26) with a magnification of about unity. Munro lens (36) accelerates the beam of selected ion species and demagnifies the image through a long working distance to provide an ion writing spot of less than about 1000 .ANG. size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.