Graft copolymers, process for the preparation thereof and ionizing radiation sensitive resist using such copolymers
US4559389A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 1985 |
| Grant date | Dec 17, 1985 |
| Priority date | — |
| Expiry date | Jan 10, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/033
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Solvent-soluble copolymers having a number average molecular weight of about 1,000 to about 1,000,000 and comprising recurring units of the following formulae (I) and (II) (case A) or recurring unit of the following formulae (I), (II) and (III) (case B) or solvent-soluble graft copolymers having a number average molecular weight of about 1,500 to about 2,000,000 and comprising recurring units of the following formulae (I), (II) and/or (II'), and (IV) (case C) or recurring units of the following formulae (I), (II) and/or (II'), (III) and (IV) (case D), said recurring units being combined to form the main alkylene chain, wherein in the cases A and B the amount of the formula (I) unit is about 3 to 60 mol % of the total amount of the whole units, and in the cases C and D the amount of the formula (I) unit is about 5 to 60 mol % of the total amount of the units of formulae (I), (II) and/or (II'), and (IV), and in the cases B and D the amount of the formula (III) unit is about 1 to 40 mol % of the total amount of the whole units, and in the cases C and D the amount of the side chains enclosed in brackets of the formula (IV) unit is at least about 10% by weight of the amount of the main …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.