Vacuum pump apparatus
US4559787A · kind A · utility
6Cited by
21References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1984 |
| Grant date | Dec 24, 1985 |
| Priority date | — |
| Expiry date | Dec 4, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An improved cryopumping apparatus which comprises a cryopumping space which may be alternately opened and closed from the surrounding area by moveable panels, trubular cryopanels within said cryopumping space through which a coolant such as liquid helium may be passed, and an apparatus for spraying liquid argon onto said cylindrical cryopanels in order to enhance the cryogenic entrapment of such low-z ions, atoms, and molecules as hydrogen and helium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.