Patent · US Expired

High current ion source

US4562355A · kind A · utility

7Cited by

6References

10Claims

0Family size

Assignee

Gesellschaft f/u/ r Schwerionenforschung mbH Darmstadt · DE

Inventors

Roderich Keller · Darmstadt, DE
Fritz Nohmayer · Frankfurt, DE

Key dates

Filing date	Feb 28, 1985
Grant date	Dec 31, 1985
Priority date	—
Expiry date	Feb 28, 2005

Classification

Technology area (CPC H)Electricity
CPC primaryH01J27/02
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A high current ion source for generating ion beams from gases and non-volatile materials which comprises a furnace-cathode unit for generating vapor to be ionized, a major source unit for ionizing the vapor generated in the furnace-cathode chamber and an extraction unit for removing the ions from the major source unit. The three units are removably sealed to each other by vacuum-tight seals. The furnace-cathode unit includes a furnace chamber, the major source unit includes a discharge chamber and the extraction unit a source outlet electrode. Connecting means couple the furnace chamber to the discharge chamber, and suspension means are provided for suspending the components from surrounding flanges.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.