Method for the manufacture of a display screen based on thin-film transistors and capacitors
US4563806A · kind A · utility
Inventors
Key dates
| Filing date | May 7, 1984 |
| Grant date | Jan 14, 1986 |
| Priority date | — |
| Expiry date | May 7, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/103
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Method for the manufacture of electronic circuits based on thin-film transistors and capacitors. According to the invention this method comprises the following operations: deposition of a layer (102) of a first transparent, conductive material on an insulating substrate (100), first photogravure applied to the first layer to constitute blocks (106) forming one of the plates of the future capacitors, as well as the sources and drains for the future transistors, deposition of a hydrogenated, amorphous silicon layer (110), deposition of an insulating layer (112), deposition of a layer (114) of a second conductive material and second photogravure applied to the silicon layer-insulating layer-conductive layer assembly in order to define the control grids of the transistors. Application to the construction of display screen control circuits or BBD registers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.