Tailoring of novolak and diazoquinone positive resists by acylation of novolak
US4564575A · kind A · utility
28Cited by
5References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1984 |
| Grant date | Jan 14, 1986 |
| Priority date | — |
| Expiry date | Jan 30, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0236
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Reduction of the alkaline developer solubility of novolak-diazoquinone positive resists by acylation of phenolic hydroxyl groups of the novolak resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.