Wafery works receiving or delivering device
US4566841A · kind A · utility
Inventors
Key dates
| Filing date | Nov 30, 1983 |
| Grant date | Jan 28, 1986 |
| Priority date | — |
| Expiry date | Nov 30, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Wafery works receiving or delivering device comprise a work supporting means having plural pairs of supporting grooves of a given pitch in order to support a column of wafery works; a transfer mechanism having the work supporting means mounted at the upper end thereof and reciprocatable between a stand-by position and a work receiving or delivering position; a pair of forks disposed in the region of the work receiving or delivering position and having supporting grooves of the same pitch as those of the work supporting means; a fork advancing mechanism such that for advancing the forks to the work receiving or delivering position such that the forks overlap the work supporting means and the supporting grooves thereof align with those of the work supporting means; and a mechanism which collectively hands over the works supported on the work supporting means or on the forks to the forks or the work supporting means by moving the work supporting means upward or downward relative to the forks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.