Linear transfer device for wafery works
US4569624A · kind A · utility
Inventors
Key dates
| Filing date | Nov 30, 1983 |
| Grant date | Feb 11, 1986 |
| Priority date | — |
| Expiry date | Nov 30, 2003 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A linear transfer device for wafery works comprising: a work supporting means provided each in a work supplying station, one or more working stations and a work discharging station, which supports the works in erect positions in front thereof, the stations being linearly arranged with equal distances; a feeding means for axially feeding the work supporting means; a transfer bar capable of moving horizontally and vertically and holding means provided on the transfer bar which are adapted to face to the stations and have a pair of supporting grooves in order to support the work in an erect position, characterized in that the delivery or reception of the work supported by each work supporting means or each holding means can be made only by the vertical movement of the transfer bar relatively to each station and that the work supporting means can locate at the retreated positions in order to prevent from interfering with the holding means when the transfer bar is in movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.