Patent · US Expired

Electromagnetic lens polepiece structure

US4570072A · kind A · utility

3Cited by
2References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 14, 1983
Grant dateFeb 11, 1986
Priority date
Expiry dateJan 14, 2003

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J37/141
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Disclosed is an electromagnetic lens polepiece structure for use in an electron microscope comprising an upper polepiece and an opposite lower polepiece, each having a lens bore, wherein the lens bore portion of the upper polepiece protrudes toward the lens bore of the lower polepiece. The protrudant lens bore portion allows the provision of an X-ray conducting bore for the measurement without disturbing the magnetic field of the lens. This makes it possible a smaller lens bore and, consequently, the spherical aberration is reduced and the resolution of the microscope is improved. The protrudant lens bore structure allows the upper polepiece to be divided into two sections so that the bore section can be replaced easily for the measurement of X-rays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.