Electromagnetic lens polepiece structure
US4570072A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1983 |
| Grant date | Feb 11, 1986 |
| Priority date | — |
| Expiry date | Jan 14, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/141
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is an electromagnetic lens polepiece structure for use in an electron microscope comprising an upper polepiece and an opposite lower polepiece, each having a lens bore, wherein the lens bore portion of the upper polepiece protrudes toward the lens bore of the lower polepiece. The protrudant lens bore portion allows the provision of an X-ray conducting bore for the measurement without disturbing the magnetic field of the lens. This makes it possible a smaller lens bore and, consequently, the spherical aberration is reduced and the resolution of the microscope is improved. The protrudant lens bore structure allows the upper polepiece to be divided into two sections so that the bore section can be replaced easily for the measurement of X-rays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.