Laser-testing scatterferometer
US4571077A · kind A · utility
4Cited by
4References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 26, 1984 |
| Grant date | Feb 18, 1986 |
| Priority date | — |
| Expiry date | Jan 26, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/47
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to test a laser rod for inclusions, which the usual interferometer oes not test, one of the interferometer mirrors is placed on a lens such that light scattered from inclusions in the rod passes through the lens to a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.