Method for producing air bearing pads for positioning table
US4571799A · kind A · utility
26Cited by
3References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 26, 1982 |
| Grant date | Feb 25, 1986 |
| Priority date | — |
| Expiry date | Aug 26, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49639
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Air bearing pads for supporting a one-axis table in a granite bridge positioning apparatus on a thin film of air include machine-thinned sections for providing resilience to the pads in order to permit flexing sufficient to accommodate surface irregularities on the supporting surface. A single air pressure regulator provides a source of pressurized air to flow-control devices of a plurality of air bearing pads supporting a one-axis table. The individual flow-control devices adjust the flow of air to their respective air bearing pads to individually adjust the lift of the pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.