Method of making pressure-sensitive transducer

US4574438A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Heinrich Diepers · Hochstädt, DE
• Herbert Schewe · Herzogenaurach, DE

Key dates

• Filing date: Dec 11, 1984
• Grant date: Mar 11, 1986
• Expiry date: Dec 11, 2004

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/1082
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure-sensitive transducer arrangement comprises a matrix of transducer elements which are formed at the points of intersection of row conductors (35, 36) and column conductors (5 to 7). A flat substrate (2) is provided with column conductors (5 to 7), each of which is covered with a similarly-structured piezoceramic material as a dielectric medium (15 to 17). This piezoceramic material is separated from the row electrodes (35, 36) by empty spaces (24 to 26). Due to bilateral spacing of less than 100 micrometers for the row conductors and column conductors, a sensor matrix is produced with a dense packing of pressure-sensors functioning as capacitors which are formed at the cross-points of the row and column conductors. These sensors are particularly adapted for use in the gripping device of an industrial robot and make it possible to detect and determine the position of robot workpieces.