Thermal diffusion fluid flow sensor
US4576050A · kind A · utility
82Cited by
6References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1984 |
| Grant date | Mar 18, 1986 |
| Priority date | — |
| Expiry date | Aug 29, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/708
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniature solid state fluid flow sensor has a low diffusivity substrate, such as a polymer film, which is optionally mounted on a thermally conductive base. A resistor strip on the substrate is connected to an electrical oscillator and thus emits thermal waves which are propagated through the fluid at a rate dependent on a fluid flow component perpendicular to the strip. A thermoelectric detector, spaced from one side or each side of the strip, senses the thermal waves; and detector circuitry determines the time or phase shift due to fluid flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.